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Lam Research unveils Dextro, a maintenance robot for fabs
On Tuesday, Lam Research introduced its Dextro collaborative ... Finally, Dextro can safely remove polymer build-up from chamber walls without requiring disassembly, eliminating the need for ...
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Lam Research launches collaborative robots to optimize critical maintenance in chip factories
Learn More Chip equipment maker Lam Research introduced Dextro ... Precise assembly helps control etch performance at the wafer edge, improving yield. Dextro tightens high-precision vacuum ...